NOC:Fundamentals of Micro and Nanofabrication


Lecture 1 - Introduction


Lecture 2 - Substrate


Lecture 3 - Substrate (Continued...)


Lecture 4 - Introduction to cleanroom


Lecture 5 - Contamination and surface cleaning


Lecture 6 - Advanced cleaning techniques


Lecture 7 - Defects


Lecture 8 - Diffusion


Lecture 9 - Diffusion - Advanced Concepts


Lecture 10 - Ion Implantation


Lecture 11 - Ion Implantation (Continued...)


Lecture 12 - Native Films


Lecture 13 - Native Films: Advanced Concepts


Lecture 14 - Native Films: Defects at Si/SiO2 interface


Lecture 15 - Methods and Some Definitions


Lecture 16 - Chemical Vapor Depostion: Basics


Lecture 17 - Chemical Vapor Depostion: Precursor Transport


Lecture 18 - Chemical Vapor Depostion: Types of CVD Equipment


Lecture 19 - Chemical Vapor Depostion: Nucleation and Growth


Lecture 20 - Chemical Vapor Depostion: Other Details


Lecture 21 - Atomic Layer Depostion


Lecture 22 - Atomic Layer Depostion (Continued...)


Lecture 23 - Physical Vapor Deposition: Basics


Lecture 24 - Physical Vapor Deposition: Evaporation


Lecture 25 - Physical Vapor Deposition: Sputtering


Lecture 26 - Mettalization: Contact resistance


Lecture 27 - Mettalization: Electromigration and Epilogue


Lecture 28 - Pattern Transfer Bascis


Lecture 29 - Optical lithography basics: resist process - 1


Lecture 30 - Optical lithography basics: resist process - 2


Lecture 31 - Optical Lithography: Contact and Proximity printing


Lecture 32 - Optical Lithography: Stepper and Scanner


Lecture 33 - Projection Lithography: Image formation basics


Lecture 34 - Projection Lithography: Image formation in photoresist


Lecture 35 - Optical lithography: Surface Reflection


Lecture 36 - Optical Lithography: Mask Technology


Lecture 37 - Lithography process technology glossary


Lecture 38 - Optical Lithography: Resolution enhancement


Lecture 39 - Electron beam lithography: Basics


Lecture 40 - Electron beam lithography: Resist process


Lecture 41 - Emerging lithography techniques


Lecture 42 - Etching Figures of Merit


Lecture 43 - Wet etching Basics


Lecture 44 - Wet Ething Recipes


Lecture 45 - Wet Ething Recipes


Lecture 46 - Dry etch: Plasma Basics


Lecture 47 - Dry etch: Plasma etching basics


Lecture 48 - Dry etch: Plasma tool configuration


Lecture 49 - Dry etch: Etch mechanism


Lecture 50 - Dry etch: Etch chemistry


Lecture 51 - Chemical Mechanical Polishing (CMP): Basics


Lecture 52 - Chemical Mechanical Polishing (CMP): Tool and process


Lecture 53 - Design for Manufacturability - 1


Lecture 54 - Design for Manufacturability - 2


Lecture 55 - Design for Manufacturability: Case study


Lecture 56 - Process integration


Lecture 57 - PV integration


Lecture 58 - CMOS integration


Lecture 59 - Lab demo: Silicon Nitride cantilever fabrication - 1


Lecture 60 - Lab demo: Silicon Nitride cantilever fabrication - 2


Lecture 61 - CMOS process for photonics application