NOC:A brief Introduction of Micro-Sensors


Lecture 1 - Introduction to Microscale Sensors or MEMS


Lecture 2 - Scaling effect


Lecture 3 - Some Simple Mechanics


Lecture 4 - Basic Mechanics - Part 1


Lecture 5 - Basic Mechanics - Part 2


Lecture 6 - Basic Mechanics - Part 3


Lecture 7 - Electrostatics


Lecture 8 - Electrostatic force


Lecture 9 - Coupled electromechanics


Lecture 10 - Stiction


Lecture 11 - Si crystal structure


Lecture 12 - Si etching


Lecture 13 - KOH etching


Lecture 14 - TMAH etching


Lecture 15 - Deposition and Lithography


Lecture 16 - Lithography


Lecture 17 - Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing


Lecture 18 - Pressure Sensor - II


Lecture 19 - Pressure Sensor - III


Lecture 20 - Accelerometer - I


Lecture 21 - Accelerometer - II


Lecture 22 - Assignment 1


Lecture 23 - Assignment 2